E11600 - SEMI E116 - 装置性能トラッキング（EPT）のための仕様 Revision:SEMI E116-0707E - Superseded

E11600 - SEMI E116 - 装置性能トラッキング（EPT）のための仕様 Revision:SEMI E116-0707E - SupersededNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI E 20079R1 13 300 mmEPT EPTEPTEPTEPTMES: Manufacturing Execution SystemSEMI E10SEMI E79EPT (EPT: Equipment Performance Tracking) EPT SEMI E10SEMI E58 SEMI E58SEMI E58SEMI E10 SEMI E10SEMI E79SEMI E10SEMI E79EPTSEMI E10SEMI E79EPTSEMI

1が新たに作成されたことを反映して，0307の出版サイクルで更新された。

그 내용이 가지는 의미와 장비에서 지원하는 데이터가 어떤 인터페이스로 관리되는지를 정의한다

the industrial applications of these components require high mechanical strength

The specified cast silicon wafer includes cast silicon category I wafer and cast silicon category II wafer

Tube fittings defined in this method are made of fluorocarbon materials for all parts in contact with the internal fluid

SEMI D57 — Definition of Measurement Index (VCT) for Mura in FPD Image Quality Inspection

and Safety Guideline for Exhaust Ventilation of Semiconductor Manufacturing EquipmentSEMI S7 — Safety Guideline for Evaluating Personnel and Evaluating Company QualificationsSEMI S8 — Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing EquipmentSEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation ProcessSEMI S12 — Environmental

Organics deposited on wafers can cause degradation haze

and limits of variation

SEMI E10-86 (first published)

SEMI E6-82 (first published)

8 — Guide for High Purity and Ultrahigh Purity Gas Distribution Systems in Semiconductor Manufacturing Equipment